In this paper, the new lapping slurry and polishing slurry are launched. And the deliquescence degree of CLBO is fallen to lowest. A different Functioning technology can also be adopted. After tough sprucing, the focus of extremely-precision sprucing slurry is elevated effectively. So does the extremely-precision sprucing speed, as well as wiping speed is quicker when compared to the deliquescence speed. The CLBO crystal surface area roughness can obtain 1nm and maintain the surface area top quality properly. Entry through your establishment

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For example, The present concave OC could get replaced by a plane mirror which could mitigate the ability density on the surface area of M1 and the diamond. What's more, employing higher problems threshold coatings for M1 and diamond would also improve the output electricity with none damages. Then, the NIR laser in the 2nd Stokes wavelength may very well be large adequate, in addition to its great beam excellent, to create the final DUV laser at 193 nm which has a large regular ability.

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Both equally the 1040 nm and 1078 nm laser originate from a person twin-wavelength Yb-doped fiber laser. Every single laser is amplified by stages of fiber amplifier and Yb-doped supplies amplifier, respectively.

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In the scientific and industrial apps, the beam quality on the DUV laser can be a significant parameter. Specially, the beam top quality from the DUV laser substantially impacts the laser machining success. The beam good quality from the DUV laser is decided by that of the fundamental laser plus the crystal for the frequency conversion. A short while ago, a substantial-energy DUV laser (>ten W) at 258 nm was reported using a beam high-quality of M2 < 1.five, which was created by FHG of a Yb:YAG laser at 1030 nm utilizing the CLBO crystal [thirteen]. This laser would result in a far better here laser machining outcome when compared to the previous DUV lasers with greater M2.

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The beam profile proven in Figure 7b demonstrated a great beam quality as one of many deserves of Raman laser, which might be valuable to produce a 193-nm DUV laser with a high quality beam.

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